Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e489719c5433b26a9352e6ea776969ab |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24479 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-15 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0812 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-30 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26506 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26513 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26566 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H3-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-80 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02115 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-147 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D59-00 |
filingDate |
2011-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e976fcd7ff1cd3a2718165ab66bb3ffa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6ed366e7074c0e1e8c876601b6bda34 |
publicationDate |
2012-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
CA-2811750-A1 |
titleOfInvention |
Method and apparatus for neutral beam processing based on gas cluster ion beam technology |
abstract |
An apparatus, method and products thereof provide an accelerated neutral beam derived from an accelerated gas cluster ion beam for processing materials. |
priorityDate |
2010-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |