| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bcff13f8573db698307f919e6385d5c4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G21K5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05G2-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05G2-00 |
| filingDate |
2010-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27551d515b2aaa3f1f6c98742e6eff04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf8d3b4f2f95f28a05e86e6d7125ab84 |
| publicationDate |
2010-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CA-2760612-A1 |
| titleOfInvention |
In-situ plasma/laser hybrid scheme |
| abstract |
A method and apparatus for forming layers on a target. The apparatus and method employ a direct current plasma apparatus to form at least one layer using a plasma jet containing precursors. In some embodiments, the direct current plasma apparatus utilizes axial injection of the precursors through the cathode (in an upstream and/or downstream configuration) and/or downstream of the anode. In some embodiments, the direct current plasma apparatus can comprise a laser source for remelting the layer using a laser beam to achieve insitu densification thereof. |
| priorityDate |
2009-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |