http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-2750434-A1
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7c852d7a0e47e626b0296e83ae9782b7 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
filingDate | 2010-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1b0a7ce81380b3c0e0e8f9ccf5ae6f9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a45e7216d79060a52e9ae779940e4a8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07df5dc44ea265b68a5359286c6a0909 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_877c1f303cef8decdabf3a8fabfd804e |
publicationDate | 2010-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CA-2750434-A1 |
titleOfInvention | Large area, homogeneous array fabrication including substrate temperature control |
abstract | Improved patterning at small scale including nanoscale. A method comprising: providing at least one cantilever comprising at least one tip thereon, and a material deposited on the tip, contacting the cantilever with a substrate so that the material is deposited from the tip onto the substrate to form a material deposit, wherein the temperature of the substrate is adapted to control a size of the material deposit. A device comprising: at least one heat sink, at least one heating or cooling stage, at least one vacuum system, wherein the device is adapted to function with a substrate to be subjected to a material deposition and to keep the substrate temperature substantially constant during deposition. |
priorityDate | 2009-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.