http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-2709809-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_171bfea6397d85729c482f6953afdc41 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N39-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N19-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-079 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-077 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-098 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N15-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L37-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-45 |
| filingDate | 2008-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eec7f8ada0ef36fc1c8a34147c581739 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb482ec9fe66ad98d179e7c4c7eed968 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_38f51856831538fb14ae66cfc7ddc29f |
| publicationDate | 2009-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CA-2709809-A1 |
| titleOfInvention | Method for making p(vdf/trfe) copolymer layer sensors, and corresponding sensor |
| abstract | The invention relates to the manufacture of a matrix sensor using a sensitive layer of a ferroelectric P(VDF/TrFE) copolymer, deposited on an integrated circuit (10, 12, 13). In order to simplify the manufacture and improve the yields, deposited first on the integrated circuit is a first layer of titanium (116) and it is etched in order to form a matrix array of electrodes electrically connected to the integrated circuit; next, a P(VDF/TrFE) copolymer comprising a small proportion of around 1 to 10% of a second polymer that favors the adhesion of the P(VDF/TrFE) copolymer is deposited on the integrated circuit; the polymer is either underneath the P(VDF/TrFE) or blended therewith. The copolymer and its adhesion promoter are etched in a single step, and finally a second conductive layer (120) is deposited and it is etched in order to form a counter electrode for the whole of the matrix array. Application: ultrasonic image sensors. |
| priorityDate | 2007-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.