| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3537bc4ac1d73f7996147114fd18e77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e117fb28709ef21c50c8e6d47f8929aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_187a3a1a8bc6e2550cf32f092cf558e0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H59-0009 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G5-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B5-00 |
| filingDate |
2008-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b09193bb58d0f0901ebcabd6d4b9585f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b35e76451c27270cf535aed5c8fa10e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad51fbd21e9b0dc24229f7b1346ffdbf |
| publicationDate |
2009-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CA-2633534-A1 |
| titleOfInvention |
Mems based rf components with vertical motion and parallel-plate structure and manufacture thereof using standard cmos technologies |
| abstract |
A process of manufacturing parallel-plate microstructures by integrating the microstructures in a chip using a CMOS process is provided. A MEMS variable capacitor, a tunable band-pass filter, tunable matching networks, and capacitive RF-MEME switches all having vertically movable components and are integrated into a chip. |
| priorityDate |
2008-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |