| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_20102068ad3a37896b481112d0084a0a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2562-0247
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-096
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-0264
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-03 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0073
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00301 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2006-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47d4db04d26a9c2df290d10b6d37b09c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f48f537aef410ff6a3c86d0c9fc5204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_946f3d2f2c9272cf20e6e298e194e0c0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3e97f1e49d1fe169ea6b67d04ee3bd1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d27e2e50b439f99079450e9759be54fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b53edb6b77bf1a75496c2fcd321b92a |
| publicationDate |
2006-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CA-2597289-A1 |
| titleOfInvention |
Method of manufacturing a hermetic chamber with electrical feedthroughs |
| abstract |
A method of manufacturing a hermetically-sealed chamber with an electrical feedthrough includes the step of hermetically fixing an electrode to a substrate in a predetermined location on the substrate. A passage is formed through the substrate through the predetermined location such that at least a portion of the electrode is exposed to the passage. The passage is then at least partially filled with an electrically conductive material. A housing is then formed including the substrate such that the housing defines a chamber, with the electrode being disposed within the housing and the chamber being hermetically sealed. The electrode within the chamber can be placed in electrical communication with an exterior electrical component by way of the electrically conductive material in the passage. |
| priorityDate |
2005-02-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |