http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-2543556-C
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5c79122cf3f205862c37b15a5fbdea31 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0256 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0427 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-22 |
| filingDate | 2001-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06bd9cd2accc2a539e00ab8b3bee8b5d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab49e651c232a27d42e095c2780951f8 |
| publicationDate | 2007-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CA-2543556-C |
| titleOfInvention | Flexural plate wave sensor array |
| abstract | The present invention relates to a flexural plate wave sensor array comprising a substrate, a plurality of flexural plate wave sensors, a reference flexural plate wave sensor and a microprocessor. Each sensor comprises a cavity formed in the substrate, a thin film membrane layer spanning the cavity, a piezoelectric layer disposed on the thin film membrane layer and a transducer disposed on the piezoelectric layer. The microprocessor is electrically connected to each of the flexural plate wave sensors for monitoring resonant frequency characteristics of the sensors. |
| priorityDate | 2000-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.