http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-2461153-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7bd26f2dbf037eb3aa1498013947d886 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-281 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-86 |
| filingDate | 2002-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14f68a0bad76bd1ec0419d728829aa7e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7306508417a65d8ff428869a0438b9a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0d25cd557209c70e073236ee3ab99ed http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d82817db831c196b3b04e397673629c0 |
| publicationDate | 2003-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CA-2461153-A1 |
| titleOfInvention | System and method for determining and controlling contamination |
| abstract | A preferred embodiment includes a method for monitoring the performance of a filter positioned in an airstream in a semiconductor processing system. The method includes sampling the airstream at a location upstream of the filter to detect the molecular contaminants present in the airstream; identifying a target species of the contaminants upstream; selecting a non-polluting speci es of a contaminant having a concentration greater than a concentration of the target species; measuring the non-polluting species in the airstream at a plurality of locations; and determining the performance of the filter with respect to the target species from measurements of the non-polluting species . The plurality of locations includes a location downstream of the filter and at a location within the filter. Further, the method.for monitoring includes generating a numerical representation of a chromatogram of the airstream sampled at a location upstream of the filter. The method for monitoring includes the non-polluting species having a molecular weight that is lower than that of the target species. In addition, in the method for monitoring t he step of sampling includes collecting refractory compounds, high molecular weight compounds and low molecular weight compounds. The filter comprises absorptive material. |
| priorityDate | 2001-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 78.