http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-2431017-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c72d118f5664072de841f9c5c34b9d99 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45563 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-513 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-513 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-10 |
| filingDate | 2001-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_03fee4b9ac1333f007d2456ee36f3d12 |
| publicationDate | 2002-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CA-2431017-A1 |
| titleOfInvention | Injector and method for prolonged introduction of reagents into plasma |
| abstract | A method and apparatus for injecting a fluid into a plasma stream with a uniform distribution and with reduced likelihood of clogging over prolonged use is provided. An injector (2) includes a first channel portion (6) for restricting a flow of the fluid and having a shape such that inner walls of the first channel portion (2) are parallel to a first axis (9). The injector (2) also includes a second channel portion (8) in fluid communication with the first channel portion (69). The second channel portion (8) includes a recessed portion such that inner walls of the second channel portion (8) diverge from the first axis (9) at a predetermined angle. The second channel portion (8) reduces a buildup of a clogging layer on the inner walls of the second channel portion (8) over a period of use. In addition, the injector (2) can further include a tip portion (28) that protrudes into the plasma. The injector (2) can be integrated into or interchangeable within an injector system that can be designed for operation within a plasma deposition apparatus. |
| priorityDate | 2000-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 101.