http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-2360713-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7440989377efecb6e90aae571adbfc17 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T407-27 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-36 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
| filingDate | 2000-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f274f4f0d521285dd02590488ed06e2f |
| publicationDate | 2000-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CA-2360713-A1 |
| titleOfInvention | Mt cvd process |
| abstract | The present invention comprises a method for coating at least one substrate with a carbonitride-containing coating by a MT CVD process which includes heating a substrate (52) or substrates (52) to a reaction temperature in a reaction chamber (10) and then introducing into the reaction chamber (10) a deposition process gas comprising from about 1 to about 30 % of a hydrogen halide and predetermined amounts of a carbon/nitrogen source, a metal-halogen compound, H2, and optionally N2 so that a layer of the carbonitride-containing coating deposits (48) on the surface of the substrates (52) or substrates (52). The present invention also includes embodiments for coating at least one substrate (52) with a carbonitride-containing coating (48) by a MT CVD process which includes maintaining a temperature gradient in the reaction chamber (10) during the introduction of the deposition process gas into the reaction chamber. Carbonitride-containing coatings (48) that may be applied by the method include carbonitrides, oxycarbonitrides, and borocarbonitrides of Ti, Hf, Zr, V, Nb, and Ta and their mixtures and alloys. |
| priorityDate | 1999-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.