http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-2302078-C
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bf01353d97677fca17ba9de3f3de79d3 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0075 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00 |
| filingDate | 2000-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2005-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a416ecd801ea4212920da0a20b36a1b8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_364bd9cb60310c1a097ec0df1819433c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7159f5276b3081175202f74cb99884d7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c811c2a4483d5bb1e8613cf1b17331e0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fe4f51e641de9c2dc28154d20fff945 |
| publicationDate | 2005-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CA-2302078-C |
| titleOfInvention | Capacitive pressure sensor or capacitive differential pressure sensor |
| abstract | The electrodes of these pressure or differential pressure sensors are formed using a technique other than silk-screen printing or sputtering: The pressure sensor (10) has a substrate (1) and a first major surface (11), a second major surface (12) and a circumferential surface (13. A plate-shaped electrode (14) of electrically conductive material is secured in a recess (15) in the major surface (11) in a high-pressure-resistant and high-vacuum-tight manner by a joining material (16). A through connection (17) is provided from the electrode (14) through the substrate (1) to the major surface (12) or the circumferential surface (13). A diaphragm (2) of ceramic, glass, or single-crystal material is attached to the substrate (1) outside the recess (15) along a joint (18) by a joining material (26), and forms itself a further electrode or is covered, on a surface facing the electrode (14), with a further electrode (24) which is contacted through the joint (18). Substrate and diaphragm consist of a ceramic, glass, or single-crystal material. Respective differential pressure sensors have either a common central diaphragm and two substrates or a common substrate and two diaphragms. |
| priorityDate | 1999-03-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 30.