http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-2266803-C

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_faf522b8b83eded745c73018576219ba
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2201-30457
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-025
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02
filingDate 1999-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2003-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c99385a5030d600b82de1cb1557c9802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_482fa9bdde7e70d378dd1c6be0f18f73
publicationDate 2003-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CA-2266803-C
titleOfInvention Method for producing needle diamond-type structure
abstract A method for producing a needle diamond-type structure comprises steps of placing an anodized alumina on a diamond substrate, which anodized alumina has a plurality of through holes and functions as a mask; vapor-depositing a substance resistant to plasma etching by a vacuum vapor-depositing method to form dots on the diamond substrate; removing the anodized alumina; and performing a plasma etching treatment using the dots as a mask, thereby forming regularly arranged needle-type diamond columns.
priorityDate 1998-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 26.