http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-2266803-C
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_faf522b8b83eded745c73018576219ba |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2201-30457 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-025 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J9-02 |
filingDate | 1999-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2003-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c99385a5030d600b82de1cb1557c9802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_482fa9bdde7e70d378dd1c6be0f18f73 |
publicationDate | 2003-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | CA-2266803-C |
titleOfInvention | Method for producing needle diamond-type structure |
abstract | A method for producing a needle diamond-type structure comprises steps of placing an anodized alumina on a diamond substrate, which anodized alumina has a plurality of through holes and functions as a mask; vapor-depositing a substance resistant to plasma etching by a vacuum vapor-depositing method to form dots on the diamond substrate; removing the anodized alumina; and performing a plasma etching treatment using the dots as a mask, thereby forming regularly arranged needle-type diamond columns. |
priorityDate | 1998-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.