| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_69108fc12b940ede105638f37f06080b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-54 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-361
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-12 |
| filingDate |
1996-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a6b0731978e5be2606667a237d66d4c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_224214d4a4fd439ddbede8a0c0e8b603
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20c53aef8fec0bd8384078b220a91b68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6d3efdbec36b5b77bf6a34a066b1617 |
| publicationDate |
2002-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CA-2220354-C |
| titleOfInvention |
Method and apparatus using organic vapor phase deposition for the growth of organic thin films |
| abstract |
In a method using organic vapor phase deposition (OVPD), for the growth of thin films of organic material, a volatile precursor of each component of the organic material is carried as a vapor to a hot-wall reaction chamber by independently controlled streams of carrier gas. |
| priorityDate |
1995-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |