| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_16d7f610531dbae77bcb2e95d91a071b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-225 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S3-134 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-097
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01S3-225 |
| filingDate |
1997-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d046ec7397e08bd0bbf6dd6d3f2dc13a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca8268b964d031d1b217e40504977a67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b8e7e6c70f9902cdb890fe0643e7a2dc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3caf4a82039c40dddc5ba99966bcb844 |
| publicationDate |
2004-04-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CA-2196131-C |
| titleOfInvention |
External high voltage control for a laser system |
| abstract |
An external control system for a laser system, used as an illumination source for a stepper system, is provided. The external control allows for a measuring of the energy actually distributed to a wafer and a correction of the energy dose distribution based upon this measurement. In this way, a more precise energy dose control is achieved. The external control communicates with the laser's own internal control system to provide serial inputs which allow for corrections to be made to the High Voltage setting based upon the aforementioned measurements, and coordinates with the laser's internal control system to initiate laser operation at the required intervals. |
| priorityDate |
1996-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |