http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-2164563-A1

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filingDate 1995-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee22cb7d55a6b81f11881c4fd3ca5c93
publicationDate 1996-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CA-2164563-A1
titleOfInvention Vertical vaporizer for halide-free, silicon-containing compounds
abstract A vaporizer for halide-free, silicon-containing liquid reactants used in producing preforms is provided. The vaporizer includes a heated, vertically-oriented expansion chamber (20) and a vertical hollow shaft (42) which extends into the chamber and has a plurality of orifices (45) at its upper end (44). Preheated reactant is supplied to the vertical shaft (42) at an elevated pressure and is sprayed onto the chamber's heated wall (22) by the orifices (45). A portion of the liquid reactant vaporizes upon entering the internal volume (24) of the chamber (20) due to the pressure drop between the inside of the shaft and the inside of the chamber. The remainder of the liquid reactant vaporizes by being heated through contact with the chamber's wall (22). Higher molecular weight species present in the raw material or generated by the vaporization process are collected in the bottom portion of the chamber where they can be periodically removed.
priorityDate 1994-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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