| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-071 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2881 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-326
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-268
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate |
1993-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d77c608870276b931947e363c658a7c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7b5b0beea6d23cdab7575dfe69ff3d8c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ab0e4da2630603165af48cd033668804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54c0b47a62334730f55c3a8ee951a4aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d27b95630205cb85084faf48835e2e85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bbe5385424ff3ea505a3268175258d5b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44f19305e4350a196f8486731ef3e39b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b57fffa391d661e99005f5288e6b7f30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46ea6261eee988112a861e9615d8ec75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8961bad5625bd49aac2c128119b16d81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_023c896e4f5fbcaf5744b573eeb6b90e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b62deea4d89899433861ee87a3e2c5c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eba83009e54718a68bb3118a36706d93 |
| publicationDate |
1997-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CA-2098416-C |
| titleOfInvention |
Method and apparatus for stressing, burning in and reducing leakage current of electronic devices using microwave radiation |
| abstract |
The described invention is directed to microwave methods for burning-in, electrical stressing, thermal stressing and reducing rectifying junction leakage current in fully processed semiconductor chips individually and at wafer level, as well as burning in and stressing semiconductor chip packaging substrates and the combination of a semiconductor chip mounted onto a semiconductor chip packaging substrate. Microwaves burn-in devices in a substantially shorter period of time than conventional burn-in techniques and avoid the need for special workpiece holders which are required by conventional stress and burn-in techniques. Additionally, microwave methods are described for reducing the leakage current of rectifying junctions, such as PN junctions and Schottky barrier diode junctions of semiconductor devices on fully processed semiconductor chips and wafers. |
| priorityDate |
1992-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |