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filingDate 1993-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80a181456bc16d903d14af18b61686e6
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publicationDate 1993-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CA-2094791-A1
titleOfInvention Process for depositing a compound oxide superconducting thin film
abstract Abstract of the Disclosure: A compound oxide superconducting thin film is deposited by a laser deposition while irradiating an auxiliary laser beam passing in the vicinity of the deposition surface of the substrate, in parallel to the deposition surface. Thus, a compound oxide superconducting thin film having a good superconducting property cam be deposited at a low substrate temperature.
priorityDate 1992-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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