Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N60-0521 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-087 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-28 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L39-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B12-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B23-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-28 |
filingDate |
1993-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80a181456bc16d903d14af18b61686e6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e22061b6a13091e5c32e6c5c02f181d |
publicationDate |
1993-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
CA-2094791-A1 |
titleOfInvention |
Process for depositing a compound oxide superconducting thin film |
abstract |
Abstract of the Disclosure: A compound oxide superconducting thin film is deposited by a laser deposition while irradiating an auxiliary laser beam passing in the vicinity of the deposition surface of the substrate, in parallel to the deposition surface. Thus, a compound oxide superconducting thin film having a good superconducting property cam be deposited at a low substrate temperature. |
priorityDate |
1992-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |