http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-2052508-C
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c186e9ae8cafab5df5c8d80cfa7b0fa1 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S505-728 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S505-701 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N60-207 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L39-14 |
| filingDate | 1991-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1997-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_822ea0d4f0e8fb20246e8a797058ac5f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0459559e048d78c0cee19a9e9914e78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2b13d0de7b966d8b85111f3f2a8f0037 |
| publicationDate | 1997-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CA-2052508-C |
| titleOfInvention | Method for manufacturing superconducting device having a reduced thickness of oxide superconducting layer and superconducting device manufactured thereby |
| abstract | For manufacturing a superconducting device, a first c-axis orientated oxide superconductor thin film having a very thin thickness is formed on a principal surface of a substrate, and a stacked structure of a gate insulator and a gate electrode is formed on a portion of the first oxide superconductor thin film. An .alpha.-axis orientated oxide superconductor thin film is grown, using the gate electrode as a mask, so that second and third superconducting regions having a relatively thick thickness are formed at both sides of the gate electrode, electrically isolated from the gate electrode. The superconducting device thus formed can functions as a super-FET. |
| priorityDate | 1990-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.