http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-2013478-C
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d4ada69388e0a1b68daaf536597c732 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-325 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B31-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 |
| filingDate | 1990-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1994-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ddd3a5bf6f91abbd3d5f37ce1cf1208 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f7752593e65f79d235427cfc81c4dc5 |
| publicationDate | 1994-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CA-2013478-C |
| titleOfInvention | Method of forming coatings containing amorphous silicon carbide |
| abstract | METHOD OF FORMING COATINGS CONTAINING AMORPHOUS SILICON CARBIDE ABSTRACT The invention is a method of forming a continuous coating of amorphous silicon carbide on the surface of articles by plasma enhanced chemical vapor deposition. In the method, the chemical vapor comprises a silicon-containing cyclobutane, such as a silacyclobutane or a 1,3-disilacyclo-butane. The coatings formed by the invention are useful for application to solar cells, for preventing corrosion of electronic devices, for forming interlevel dielectric layers between metallization layers of electronic devices and for providing abrasion resistance to surfaces. |
| priorityDate | 1989-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.