| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_657f8fe5931a3364fda9ccca712ad398
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_58c105515347fcdb4c53c3dcda7e88f9 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-125
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08 |
| filingDate |
1990-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31429278d79826fd8a39e21e0bb428a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0dba122ec11e2d71d617433a75cc2e3 |
| publicationDate |
1990-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CA-2009494-A1 |
| titleOfInvention |
Capacitive accelerometer with mid-plane proof mass |
| abstract |
Abstract of the Disclosure Capacitive Accelerometer with Mid-Plane Proof Mass A micromachined three-plate capacitive accelerometer incorporates a "sandwich" proof mass formed from two layers that are boron-doped to define hinges attached essentially to the mldplane of the proof mass by being placed abutting a bonding interface region at the midplane. R-3325hs-ed |
| priorityDate |
1989-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |