| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-873 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B9-1418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q20-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y35-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q60-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q70-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q10-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H02N2-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q80-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B9-14 |
| filingDate |
1989-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1993-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f88fdac708abccfb56cd610c928509e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_497141f9305a157063496145c35530fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06758c1d1f9a91b8dcc7e17f3c10c151
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4996c88f7e50586c3208e4af04254e45 |
| publicationDate |
1993-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CA-2002187-C |
| titleOfInvention |
Probe unit, driving method thereof, and scanning device for detecting tunnel current having said probe unit |
| abstract |
ABSTRACT OF THE DISCLOSURE: A probe unit comprises a substrate, a first electrode formed on the substrate, a bridge-shaped flexible member formed in the substrate and insulated by a cavity from the first electrode, and a probe provided in contact with the flexible member. The flexible member is constituted of a laminate comprising a second electrode layer, an insulating layer, and a third electrode layer for applying a voltage the probe. The first electrode may be included in the flexible member. A piezoelectric layer is between the first electrode and the second electrode. |
| priorityDate |
1988-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |