http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-1333270-C
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d2bb724dd58cbb2a73b244e79b0c9e42 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0676 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0015 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C4-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 |
| filingDate | 1988-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1994-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f3f98fd3a79a06616a91d6f98fb4748 |
| publicationDate | 1994-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CA-1333270-C |
| titleOfInvention | Sputtered titanium oxynitride films |
| abstract | A titanium oxynitride film, and a method for its production are disclosed. A method for making a titanium oxynitride coated article comprises a. placing a substrate in a coating chamber; b. evacuating said chamber; c. providing an atmosphere comprising oxygen and nitrogen in said chamber; d. placing a titanium cathode in said chamber facing a surface of said substrate; e. sputtering said titanium cathode in said atmosphere comprising oxygen and nitrogen in said chamber thereby depositing a titanium oxynitride coating on said surface of said substrate. Other aspects of the invention are also disclosed as for instance coated articles comprising titanium oxynitride in combination with other metal-containing films. |
| priorityDate | 1987-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.