http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-1314631-C
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c8e6a13e4ae501eb40decf5732cf09c6 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-70 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate | 1989-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1993-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34feaaedc35eab66ba57e2b786dc5f4a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3f88e45484b149a7bf38dffb1e832ef |
| publicationDate | 1993-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CA-1314631-C |
| titleOfInvention | Process for fabricating integrated circuits having shallow junctions |
| abstract | Abstract For integrated circuit devices with strict design rules, junctions defining the source and drain are typically more shallow than 0.25 µm and aremade through vias having an aspect ratio greater than 1.1. Suitable electrical contact to such a shallow junction is quite difficult. To ensure an appropriate contact, an adhesion barrier layer such as titanium nitride or an alloy of titanium and tungsten is first deposited. Tungsten is then deposited under conditions which produce a self-limiting effect in a prototypical deposition on silicon. Additionally, these tungsten deposition conditions are adjusted to higher rather than lower deposition temperatures. Subsequent deposition of aluminum if desired, completesthe contact. |
| priorityDate | 1988-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 32.