| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60e21de07fa18fc54e2150daffc14654 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-7684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2636 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-363
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate |
1986-05-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1988-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91b94e53bdbd905604dc62ee927d6412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbb1ea2fadcab8ca93981a8f128cb4b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_524339d77819d3054d5115bae66e2ae0 |
| publicationDate |
1988-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CA-1247464-A |
| titleOfInvention |
Method for forming a planarized thin film |
| abstract |
ABSTRACT OF THE DISCLOSURE Charged particles are irradiated over a thin film formed on a convex and concave surface of a substrate or over a thin film being formed on a convex and concave surface of a substrate. During the irradiation, raise in temperature of the thin film and impingement of charged particles cause the fludization of the thin film, so that a planarized thin film is formed within a short period of time. |
| priorityDate |
1985-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |