| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2b5ee93d55e837563f1cc5509aca8042 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32009 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate |
1985-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1988-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd4187924f96a04085c3da542057812c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4a3f96a46c05b1383e074fea72c3aa9 |
| publicationDate |
1988-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
CA-1242992-A |
| titleOfInvention |
Cathode assembly with localized profiling capabilities |
| abstract |
ABSTRACT An improved glow discharge cathode assembly for depositing localized, preselected concentration profiles of dopant or other alterant elements into a depositing host matrix of a semiconductor alloy material that is continuously deposited onto a moving substrate. |
| priorityDate |
1984-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |