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filingDate 1981-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1984-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1984-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber CA-1175158-A
titleOfInvention Planar thin film transistors, transistor arrays, and a method of making the same
abstract ABSTRACT OF THE DISCLOSURE A planar thin film transistor is described wherein each element of the transistor structure is disposed in a planar relationship with respect to the next adjacent layer. The method of manufacture generally includes the steps of depositing one of the elemental members of a thin film transistor structure and filling in the valleys between the elemental structure with an insulating material to form a planar surface which, in turn, forms the surface upon which the next planar layer is formed.
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