http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CA-1071936-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_584dce0e6fca1f9f5e683364b14d3d9f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0084 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-228 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G4-33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-08 |
| filingDate | 1975-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1980-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60bb13ff09374c408bc228e7979d980a |
| publicationDate | 1980-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | CA-1071936-A |
| titleOfInvention | Method and apparatus for depositing thin layers of insulating or slightly conductive materials by reactive spraying in a high-frequency inductive plasma |
| abstract | ABSTRACT OF THE DISCLOSURE: A method and apparatus for depositing thin layers of insulating or slightly conductive materials involves reactive spraying through high-frequency inductive plasma. The conduc-tive component of the material to be deposited is sprayed in a first chamber through which an ionizable inert gas travels, the sprayed particles then passing through a second chamber in which a substrate is placed and to which a reactive gas is supplied. Insulating and weakly inductive materials such as oxides, car-bide and nitrides may be deposited at a rate substantially com-parable with the rate for conductive materials to obtain high qualify uniform deposits. |
| priorityDate | 1974-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.