http://rdf.ncbi.nlm.nih.gov/pubchem/patent/BR-PI0610874-A2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4b3a7c92873980c579942aa518ee122e |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-22 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22 |
| filingDate | 2006-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80c68b274cc73f63181cdd9649dacb35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f700c295eac549366f79ce5800fb9fad http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e6a6be61c68ec60cd8584962521efd9 |
| publicationDate | 2010-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | BR-PI0610874-A2 |
| titleOfInvention | apparatus and process for coating a substrate |
| abstract | The present invention relates to an apparatus for coating a substrate using physical vapor deposition comprising a vacuum chamber in which a coil (1) is placed to hold a quantity of conductive material (10) in levitation and for heating. and evaporating this material using a varying electric current in the coil, and in which means (3) are placed in the coil to isolate it from the levitated material. According to the invention, the apparatus is characterized in that the insulating means are part of a container (2) made of conductive material, the container having one or more openings (5) for directing the evaporated conductive material to the substrate. to be coated. The invention relates to a process for coating a substrate using physical vapor deposition. |
| priorityDate | 2005-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 29.