http://rdf.ncbi.nlm.nih.gov/pubchem/patent/BR-9904435-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0fb905106eeabff9660bc073fb748ac5 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01C19-5656 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P3-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01C19-5656 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 |
| filingDate | 1999-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd0898588ab50a989aa4dd31c3fba2cd http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22c0089804e4a192165e97e1104c3ef3 |
| publicationDate | 2000-10-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | BR-9904435-A |
| titleOfInvention | Method for manufacturing an angular ratio or ratio sensor |
| abstract | Invention Patent: "METHOD FOR MANUFACTURING A RATE SENSOR OR ANGLE PROPORTION" This is a method of manufacturing a rate or angular proportion sensor by manufacturing components of the angular proportion sensor on a silicon substrate. , the angular proportion sensor components including one or more masses, a support beam and buried conductors. Detection devices are provided and the components are sealed or sealed in a cavity between a first glass plate and a second glass plate by means of anodic connection. This allows rate or angular proportion sensors to be manufactured using low-cost silicon wafers. |
| priorityDate | 1998-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 19.