| abstract |
an electrical unit having a multilayer conformal coating on at least one surface of the electrical unit, wherein each layer of the multilayer coating is obtained by plasma deposition of a precursor mixture comprising (a) one or more organosilicon compounds, ( b) optionally o2, n2o, no2, h2, nh3, n2, sif4 and / or hexafluoropropylene (hfp), and (c) optionally he, ar and / or kr. The chemistry of chemistry resulting from plasma deposited material can be described by the general formula: sioxhyczfanb. the coating properties as they are adapted by adjusting the values of x, y, z, a and b. |