| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0149
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76897
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02658
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76834
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-528
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02299
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5328
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76822 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate |
2013-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3247e6e77254ed4e3ba1f1be6b3a48eb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_620047bd104ed2fff13d0b15e5b8577a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e797071de36385fbe7fa0e8da2dfba30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_147baa22f84aed2af291c64c7c8cc931 |
| publicationDate |
2021-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
BR-112015029548-B1 |
| titleOfInvention |
MANUFACTURING METHOD AND INTEGRATED CIRCUIT SUBSTRATE |
| abstract |
PROMOTIONAL DIRECTED SELF-ASSEMBLY ALIGNMENT LAYERS STANDARDIZED NON-LITHOGRAPHICALLY. A method of one aspect includes forming a self-assembly alignment promoting layer directed onto a surface of a substrate having a first patterned region and a second patterned region. A first directed self-assembly alignment promoting material is selectively formed over the first patterned region without using lithographic patterning. The method also includes forming an assembled layer on top of the directed self-assembly alignment promoting layer by directed self-assembly. A plurality of assembled structures are formed, each predominantly including a first type of polymer over the first directed self-assembly alignment-promoting material. The assembled structures are each adjacently surrounded predominantly by a second different type of polymer over the second patterned region. The first directed self-assembly alignment-promoting material has a greater chemical affinity with the first type of polymer than with the second different type of polymer. |
| priorityDate |
2013-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |