http://rdf.ncbi.nlm.nih.gov/pubchem/patent/BE-1014248-A3
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-168 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31138 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2001-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2003-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b567394e8e21610efd94f0567b8bf7d |
| publicationDate | 2003-07-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | BE-1014248-A3 |
| titleOfInvention | Method for producing a printed circuit used for manufacturing semiconductor device. |
| abstract | Method for producing a circuit impression of a semiconductor device, comprising the steps of successively depositing a first impressionable layer and an antacid resist layer, processing a given thickness of the resist layer antacid in an impressionable second layer insoluble in an alkali, selective bite of the impressionable second layer to form an antacid reserve printing mask, application of O2 plasma through the antacid reserve printing mask to form an antacid reserve print, and selective bite of the first layer impressionable by the use of the antacid reserve print as mask to obtain a fine circuit impression. |
| priorityDate | 2000-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 36.