| abstract |
Radiation-sensitive compositions, comprising (a1) a compound which can be polymerized or crosslinkable by the cationic route or by acid catalysis, or (a2) a compound whose solubility increases in a developer under the effect of an acid; and (b) at least one diaryliodonium salt of formula I: in which X is branched C3-C20 alkyl or C3-C8 cycloalkyl; X1 is H or C1-C20 linear alkyl, C3-C20 branched alkyl or C3-C8 cycloalkyl; Y is C1-C10 linear alkyl, C3-C10 branched alkyl or C3-C8 cycloalkyl; A is chosen from (BF4) -, (SbF6) -, (B (C6F5) 4), C1-C20 alkylsulfonate, C2-C20 haloalkylsulfonate, unsubstituted C6-C10 arylsulfonate, camphosulfonate, (C1-C20 perfluoroalkyl ) sulfonylmethylide, (C1-C20 perfluoroalyl) sulfonylimide and C6-C10 arylsulfonate substituted by halogen, NO2, C1-C12 alkyl, C-C12 haloalkyl, or COOR1, R1 being C-C20 alkyl, phenyl, benzyl; or phenyl substituted with C1-C12 alkyl, C1-C12 alkoxy or halogen; and the two phenyls on the iodine atom not having the same substituents. |