| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0216 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
1998-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f01e258fc8a9be8a626091fe0ef26fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b710e33711771300fe2187ab87f60ac
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0dc6ebc6dbb923417b65b786c1a2bbf1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbf3615ba5f0eb07d4b30c10c7b7a26a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4b9b6b41d14e456990a425a42d30b7c |
| publicationDate |
2001-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
AU-734765-B2 |
| titleOfInvention |
Process for producing semiconductor substrate |
| priorityDate |
1997-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |