http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AU-2013204553-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8e071d18fea054bf8d1420d483e78ed1 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 |
| filingDate | 2013-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79ecb8f2d55685de458d02ee091fabe6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99290c40ffff25f9dff7bc94e05418d0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f10f4cc79da0c5f749a1d9c00208c244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_580da34cf66160f8c479057293f45eea |
| publicationDate | 2013-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | AU-2013204553-A1 |
| titleOfInvention | Self-aligned barrier and capping layers for interconnects |
| abstract | An interconnect structure for integrated circuits for copper wires in integrated circuits and methods for making the same are provided. Mn, Cr, or V containing layer forms a barrier against copper diffusing out of the wires, thereby protecting the insulator from premature breakdown, and protecting transistors from degradation by copper. The Mn, Cr, or V containing layer also promotes strong adhesion between copper and insulators, thus preserving the mechanical integrity of the devices during manufacture and use, as well as protecting against failure by electromigration of the copper during use of the devices and protecting the copper from corrosion by oxygen or water from its surroundings. In forming such integrated circuits, certain embodiments of the invention provide methods to selectively deposit Mn, Cr, V, or Co on the copper surfaces while reducing or even preventing deposition of Mn, Cr, V, or Co on insulator surfaces. Catalytic deposition of copper using a Mn, Cr, or V containing precursor and an iodine or bromine containing precursor is also provided. |
| priorityDate | 2009-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 131.