| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eccd894c99fea2d1c0c8735872bb2309 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-547
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1804
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0684
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-068 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-08 |
| filingDate |
2010-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2015-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46c9b4bcc953cbe32540165f7ad25c62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_831d9d624dcecffa85daefa48b1ca152
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e828e6ec174818c6a26e55bb7593ffef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_73e9da4331b2b9a8acf127710e5ad693
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7680f62d5e1c5a766998144b9d295ba5 |
| publicationDate |
2015-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
AU-2010294901-B2 |
| titleOfInvention |
Ink jet printable etching inks and associated process |
| abstract |
The present invention refers to a method for contactless deposition of new etching compositions onto surfaces of semiconductor devices as well as to the subsequent etching of functional layers being located on top of these semiconductor devices. Said functional layers may serve as surface passivation layers and/or anti-reflective coatings (ARCs). |
| priorityDate |
2009-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |