| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-20075 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B15-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate |
2008-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a90bd486195f144a4094dcfb53f51fc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51169e1ac7825fee67f9f7aa6ae59eed |
| publicationDate |
2010-08-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
AU-2008243203-B2 |
| titleOfInvention |
Measurement method of layer thickness for thin film stacks |
| priorityDate |
2008-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |