| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_77212be9386576ce90d2042ba67f93a1 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25C1-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
| filingDate |
2003-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3b04cff7117f830c1bd281bf671f149b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c5f68705dadece7e579666205bbb0e45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7e1e34936c38fa048864101429242666
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c76a3bc465f333fc0de6ebe6de77df7 |
| publicationDate |
2009-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
AU-2003302769-B2 |
| titleOfInvention |
Composition and method for copper chemical mechanical planarization |
| priorityDate |
2002-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |