| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7b1787fdafc9a84f27a9e2e702132f8 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-0047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25C1-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C11D11-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
| filingDate |
2003-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0b9ae26e9b57754d600de387777c62e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8860eb5419abbe40c7702dbbfe65f25b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d17ce2a955d409b88f79a6fc912c6789
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1efc79fc7c25d8ab7a922fae7ea3396 |
| publicationDate |
2004-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
AU-2003302769-A1 |
| titleOfInvention |
Composition and method for copper chemical mechanical planarization |
| priorityDate |
2002-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |