| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1a34d7d2e0d09a58cb7bf4a04c81162e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2201-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2383-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249953 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02216
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31695
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J9-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J9-26 |
| filingDate |
2002-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b2684dc86a59e48dc0e1b7a98b170f26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94f46d28bcfb5121b65bdb122927876b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_141e32aa8302cc2177be6cf688c0310e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_710ed0e19b18f8761d13b5fb0ca683df |
| publicationDate |
2003-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
AU-2002309807-A1 |
| titleOfInvention |
Low metal porous silica dielectric for integral circuit applications |
| priorityDate |
2002-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |