| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76846 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-16 |
| filingDate |
2005-10-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_12d811b000f8b277587eb534149cb84d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f402cd2b1895f9e297264f193e5ec5a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fc5cae3262348b3dbf29fb1c147c5a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b782cdab8b3a1a6be35ce819ab7b2857
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a725fe97a1a40fac12072d46706fbc11 |
| publicationDate |
2011-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
AT-519870-T |
| titleOfInvention |
METHOD FOR THE SEPARATION OF METAL LAYERS FROM METAL CARBONYLENE CARBON |
| priorityDate |
2004-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |